 | Up a level |
Hai, N. T. M.; Furrer, Julien; Stricker, Florian; Huynh, T. M. T.; Gjuroski, Ilche; Luedi, N.; Brunner, T.; Weiss, F.; Fluegel, A.; Arnold, M.; Chang, I.; Mayer, D.; Broekmann, Peter (2013). Polyvinylpyrrolidones (PVPs): Switchable Leveler Additives for Damascene Applications. Journal of the electrochemical society, 160(12), D3116-D3125. The Electrochemical Society 10.1149/2.019312jes
Hai, N.T.M.; Huynh, T.T.M.; Fluegel, A.; Arnold, M.; Mayer, D.; Reckien, W.; Bredow, T.; Broekmann, P. (2012). Competitive anion/anion interactions on copper surfaces relevant for Damascene electroplating. Electrochimica acta, 70, pp. 286-295. Kidlington, UK: Elsevier Science 10.1016/j.electacta.2012.03.054
Hai, N.T.M.; Krämer, K.W.; Fluegel, A.; Arnold, M.; Mayer, D; Broekmann, P. (2012). Beyond interfacial anion/cation pairing: The role of Cu(I) coordination chemistry in additive-controlled copper plating. Electrochimica acta, 83, pp. 367-375. Kidlington, UK: Elsevier Science 10.1016/j.electacta.2012.07.036
Hai, N.T.M.; Oderrnatt, J.; Grimaudo, V.; Krämer, K. W.; Fluegel, A.; Arnold, M.; Mayer, D.; Broekmann, P. (2012). Potential Oscillations in Galvanostatic Cu Electrodeposition: Antagonistic and Synergistic Effects among SPS, Chloride, and Suppressor Additives. Journal of physical chemistry. C, 116(12), pp. 6913-6924. Washington, D.C.: American Chemical Society 10.1021/jp2096086
